Rates

Nanofabrication and Electron Microscopy Facility (NEMF) welcomes UC Riverside students, faculty, principal investigators, and non-UC Riverside researchers to use its facilities on a fee-for-usage basis. The staff provides safety training at no additional cost, but equipment requires training fees.

Nanofabrication users are charged a cleanroom fee, which grants access to essential equipment like microscopes, fume hoods, dry etching, and wet chemical processing. However, more advanced equipment such as metal evaporators, sputters, and lithography necessitates specialized training and additional surcharges. While cleanroom supplies and safety equipment are provided, users are responsible for supplying their own substrates and any unique labware. Deposition sources currently available include aluminum, titanium, nickel, chrome, copper and others. Gold and platinum require extra charges that fluctuate based on market prices. 

As of September 2019

Service / Item UCR Academic/Govt. Commercial
Lab Use
Cleanroom Use $33.16/hr $46.26/hr $62.84/hr
Operator assistance/Training $43/hr $60/hr $60/hr
Advanced support $100/hr $100/hr $80/hr
       
Equipment Surcharge
FIB (Including Engineer) $60/hr $74/hr $108/hr
EBL (Raith) $80/hr $100/hr $153/hr
DWL (66+, new) $21/hr $30/hr $48/hr
ADCS (MCS 8, new) $48/hr $69/hr $108/hr
EBE 1 (BJD-FC 2000, new) $48/hr $69/hr $108/hr
EBE 2 $20/hr $25/hr $29/hr
Gold (Evaporation, subject to market price): $188.41, effective 1/1/2026      
Platinum (Evaporation, subject to market price): $104.43, effective 3/1/2026      
Sputter 2 $15/hr $18/hr $22/hr
AFM 1 (ICON6, new) $48/hr $69/hr $108/hr
S/TEM Titan Themis 300 $69/hr $100/hr $185/hr
TEM Talos 120 $45/hr $80/hr $100/hr
SEM NNS450 $45/hr $70/hr $100/hr
FIB SEM Quanta3D $40/hr $50/hr $75/hr
SEM Tescan Mira3 $45/hr $70/hr $100/hr
Digital Microscope VHX-7000 $25/hr $36/hr $54/hr
Basic SEM Training $150/session $200/session $280/session
Basic TEM Training $240/session $350/session $460/session
FIB Training $350/person $550/person $850/person
Sputter Cressington 108 Auto $9/min $12/min $12/min
Vacuum evaporation $22/hr $40/hr $40/hr
Critical-point-drying CPD $22/run $40/run $40/run
Ultramicrotome $12/hr $20/hr $30/hr
Glass knife maker $5/run $15/run $30/run
Lapping/polishing $21/run $40/run $40/run
Diamond saw $21/run $40/run $40/run
Fullam carbon coater $21/run $40/run $40/run
Dimpler $21/run $40/run $40/run
Tripod polisher $21/run $40/run $40/run
Disc cutter $21/hr $40/hr $40/hr
Diamond lapping films $35/film $35/film $35/film
Non-diamond lapping films $5/film $5/film $5/film
Fischione plasma cleaner $11/hr $15/hr $20/hr
C-coated Cu TEM grids $5/grid $5/grid $5/grid
Chemical reagents nominal price nominal price nominal price
Vitrobot $45/run $80/run $100/run
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