Nanofabrication and Electron Microscopy Facility (NEMF) is open to UC Riverside students, faculty, and principal investigators, as well as non-UC Riverside researchers, on a fee for usage basis. Safety training is provided by the staff at no additional cost, but equipment requires training fees.
Cleanroom users are charged a standard lab usage fee, which allows the use of microscopes, fume hoods, dry etching, and wet chemical processing. More complicated equipment, such as metal evaporators, sputters, and e-beam lithography, requires specialized training and additional usage fees. Cleanroom supplies and safety equipment are provided, but users are asked to furnish their own substrates and any unique labware. Deposition sources currently available include aluminum, titanium, nickel, chrome, etc. Gold and platinum require additional charges.
| Service / Item | UCR | Academic/Govt. | Commercial |
|---|---|---|---|
| NanoFab Use | |||
| General lab use | $33.16/hr | $46.26/hr | $62.84/hr |
| Equipment Hourly Surcharge Fees: (In addition to General Lab use fee) | |||
| FIB (Including Engineer) | $60/hr | $74/hr | $108/hr |
| Raith EBL | $80/hr | $100/hr | $153/hr |
| E-Beam Evaporator | $20/hr | $25/hr | $29/hr |
| Sputter Deposition | $15/hr | $18/hr | $22/hr |
| AFM | $45/hr | $69/hr | $108/hr |
| Microscopy Lab Use | |||
| S/TEM Titan Themis 300 | $69/hr | $100/hr | $185/hr |
| TEM Talos 120 | $45/hr | $80/hr | $100/hr |
| SEM NNS450 | $45/hr | $70/hr | $100/hr |
| FIB SEM Quanta3D | $40/hr | $50/hr | $75/hr |
| SEM Tescan Mira3 | $45/hr | $70/hr | $100/hr |
| Digital Microscope VHX-7000 | $25/hr | $36/hr | $54/hr |
| Operator assistance | $43/hr | $60/hr | $60/hr |
| Basic SEM Training | $150/session | $200/session | $280/session |
| Basic TEM Training | $240/session | $350/session | $460/session |
| FIB Training | $350/person | $550/person | $850/person |
| Support/consultation | $27/hr | $60/hr | $80/hr |
| Sample preparation | $33/hr | $60/hr | $60/hr |
| Sputter coating | $9/min | $12/min | $12/min |
| Vacuum evaporation | $22/hr | $40/hr | $40/hr |
| Critical-point-drying CPD | $22/run | $40/run | $40/run |
| Advanced support/consultation | $100/hr | $100/hr | $180/hr |
| Ultramicrotome | $12/hr | $20/hr | $30/hr |
| Lapping/polishing | $21/run | $40/run | $40/run |
| Diamond saw | $21/run | $40/run | $40/run |
| Fullam carbon coater | $21/run | $40/run | $40/run |
| Dimpler | $21/run | $40/run | $40/run |
| Tripod polisher | $21/run | $40/run | $40/run |
| Disc cutter | $21/hr | $40/hr | $40/hr |
| Diamond lapping films | $35/film | $35/film | $35/film |
| Non-diamond lapping films | $5/film | $5/film | $5/film |
| Fischione plasma cleaner | $11/hr | $15/hr | $20/hr |
| C-coated Cu TEM grids | $5/grid | $5/grid | $5/grid |
| Chemical reagents | nominal price | nominal price | nominal price |
| Vitrobot | $45/run | $80/run | $100/run |