Nanofabrication and Electron Microscopy Facility (NEMF) welcomes UC Riverside students, faculty, principal investigators, and non-UC Riverside researchers to use its facilities on a fee-for-usage basis. The staff provides safety training at no additional cost, but equipment requires training fees.
Nanofabrication users are charged a cleanroom fee, which grants access to essential equipment like microscopes, fume hoods, dry etching, and wet chemical processing. However, more advanced equipment such as metal evaporators, sputters, and lithography necessitates specialized training and additional surcharges. While cleanroom supplies and safety equipment are provided, users are responsible for supplying their own substrates and any unique labware. Deposition sources currently available include aluminum, titanium, nickel, chrome, copper and others. Gold and platinum require extra charges that fluctuate based on market prices.
| Service / Item | Member | Nonmember | |||
|---|---|---|---|---|---|
| Academic / Nonprofit | Profit | ||||
| FY25-26 | FY26-27 | FY25-26 | FY26-27 | ||
| Membership Fee* (quarterly) | — | — | $1.2k | — | small $2.8k other $6k |
| Staff Fee (Training / Operator Assistance) | $42/h | $43/h | $48/h | $60/h | $66/h |
| Staff Fee (Advanced support / FIB) | $100/h | $100/h | $110/h | $180/h | $198/h |
| New User Setup Fee* | $0/user | — | $0/user | — | $200/user |
| Reactivation Fee* | $50/user | — | $50/user | — | $50/user |
| Gold** | $253/g (effective 6/1/2026; no nonmember rate available) | ||||
| Platinum** | $104.43/g (effective 4/1/2026; no nonmember rate available) | ||||
| Nanofabrication Lab (Equipment Surcharge + General Lab Use = Total Charge) | |||||
| General Lab Use | $0/h | $33.16/h | $36.5/h | $62.84/h | $69/h |
| EBL (Raith Pioneer2) | $63/h | $80/h | $75/h | $153/h | $168/h |
| ADCS (MCS8) | $42/h | $48/h | $48/h | $108/h | $108/h |
| AFM (ICON6) | $42/h | $48/h | $48/h | $108/h | $108/h |
| EBE 1 (BJD-FC-2000) | $42/h | $48/h | $48/h | $108/h | $108/h |
| EBE 2 | $18/h | $20/h | $21/h | $29/h | $48/h |
| EBE 3 | $18/h | $20/h | $21/h | $29/h | $48/h |
| DWL | $18/h | $21/h | $21/h | $48/h | $48/h |
| Sputter 1 | $18/h | $15/h | $21/h | $22/h | $48/h |
| Sputter 2 (AJA) | $18/h | $15/h | $21/h | $22/h | $48/h |
| MA (MA6)* | $18/h | — | $21/h | — | $48/h |
| ALD* | $18/h | — | $21/h | — | $48/h |
| ALE* | $18/h | — | $21/h | — | $48/h |
| Si Etcher* | $18/h | — | $21/h | — | $48/h |
| Metal Etcher* | $18/h | — | $21/h | — | $48/h |
| PPMS* | $18/h | — | $21/h | — | $48/h |
| Wire Bonder* | $18/h | — | $21/h | — | $48/h |
| Microscopy Lab | |||||
| STEM (Titan) | $63/h | $69/h | $75/h | $185/h | $168/h |
| TEM (Talos) | $42/h | $45/h | $48/h | $100/h | $108/h |
| SEM (NNS 450) | $42/h | $45/h | $48/h | $100/h | $108/h |
| SEM (Quanta) | $42/h | $40/h | $48/h | $75/h | $108/h |
| SEM (Mira3) | $42/h | $45/h | $48/h | $100/h | $108/h |
| DLM (VHX-7000) | $18/h | $25/h | $21/h | $54/h | $48/h |
| Vitrobot | $18/h | $45/run | $21/h | $100/run | $48/h |
| Ultramicrotome | $13.2/h | $12/h | $13.2/h | $30/h | $33/h |
| Glass knife maker | $5.5/run | $5/run | $5.5/run | $30/run | $33/run |
| Sputter coater | $9.9/min | $9/min | $9.9/min | $12/min | $13.2/min |
| Glow discharger | $11/run | $10/run | $11/run | $20/run | $22/run |
| Vacuum evaporator | $24.2/h | $22/h | $24.2/h | $40/h | $44/h |
| CPD | $24.2/h | $22/h | $24.2/h | $40/h | $44/h |
| Disc cutter | $24.2/h | $22/h | $24.2/h | $40/h | $44/h |
| Fischione plasma cleaner | $12.1/h | $11/h | $12.1/h | $20/h | $22/h |
| Lapping/polishing | $23.1/run | $21/run | $23.1/run | $40/run | $44/run |
| Diamond saw | $23.1/run | $21/run | $23.1/run | $40/run | $44/run |
| Fullam carbon coater | $23.1/run | $21/run | $23.1/run | $40/run | $44/run |
| Dimpler | $23.1/run | $21/run | $23.1/run | $40/run | $44/run |
| Tripod polisher | $23.1/run | $21/run | $23.1/run | $40/run | $44/run |
| Diamond lapping films | $38.5/film | $35/film | $38.5/film | $35/film | $38.5/film |
| Non-diamond lapping films | $5.5/film | $5/film | $5.5/film | $5/film | $5.5/film |
| C-coated Cu TEM grids | $5.5/grid | $5/grid | $5.5/grid | $5/grid | $5.5/grid |
| Chemical reagents** | nominal price | — | nominal price | — | nominal price |
* New rates. ** Subject to market prices.