Nanofabrication and Electron Microscopy Facility (NEMF) welcomes UC Riverside students, faculty, principal investigators, and non-UC Riverside researchers to use its facilities on a fee-for-usage basis. The staff provides safety training at no additional cost, but equipment requires training fees.
Nanofabrication users are charged a cleanroom fee, which grants access to essential equipment like microscopes, fume hoods, dry etching, and wet chemical processing. However, more advanced equipment such as metal evaporators, sputters, and lithography necessitates specialized training and additional surcharges. While cleanroom supplies and safety equipment are provided, users are responsible for supplying their own substrates and any unique labware. Deposition sources currently available include aluminum, titanium, nickel, chrome, copper and others. Gold and platinum require extra charges that fluctuate based on market prices.
As of September 2019
| Service / Item | UCR | Academic/Govt. | Commercial |
|---|---|---|---|
| Lab Use | |||
| Cleanroom Use | $33.16/hr | $46.26/hr | $62.84/hr |
| Operator assistance/Training | $43/hr | $60/hr | $60/hr |
| Advanced support | $100/hr | $100/hr | $80/hr |
| Equipment Surcharge | |||
| FIB (Including Engineer) | $60/hr | $74/hr | $108/hr |
| EBL (Raith) | $80/hr | $100/hr | $153/hr |
| DWL (66+, new) | $21/hr | $30/hr | $48/hr |
| ADCS (MCS 8, new) | $48/hr | $69/hr | $108/hr |
| EBE 1 (BJD-FC 2000, new) | $48/hr | $69/hr | $108/hr |
| EBE 2 | $20/hr | $25/hr | $29/hr |
| Gold (Evaporation, subject to market price): $188.41, effective 1/1/2026 | |||
| Platinum (Evaporation, subject to market price): $104.43, effective 3/1/2026 | |||
| Sputter 2 | $15/hr | $18/hr | $22/hr |
| AFM 1 (ICON6, new) | $48/hr | $69/hr | $108/hr |
| S/TEM Titan Themis 300 | $69/hr | $100/hr | $185/hr |
| TEM Talos 120 | $45/hr | $80/hr | $100/hr |
| SEM NNS450 | $45/hr | $70/hr | $100/hr |
| FIB SEM Quanta3D | $40/hr | $50/hr | $75/hr |
| SEM Tescan Mira3 | $45/hr | $70/hr | $100/hr |
| Digital Microscope VHX-7000 | $25/hr | $36/hr | $54/hr |
| Basic SEM Training | $150/session | $200/session | $280/session |
| Basic TEM Training | $240/session | $350/session | $460/session |
| FIB Training | $350/person | $550/person | $850/person |
| Sputter Cressington 108 Auto | $9/min | $12/min | $12/min |
| Vacuum evaporation | $22/hr | $40/hr | $40/hr |
| Critical-point-drying CPD | $22/run | $40/run | $40/run |
| Ultramicrotome | $12/hr | $20/hr | $30/hr |
| Glass knife maker | $5/run | $15/run | $30/run |
| Lapping/polishing | $21/run | $40/run | $40/run |
| Diamond saw | $21/run | $40/run | $40/run |
| Fullam carbon coater | $21/run | $40/run | $40/run |
| Dimpler | $21/run | $40/run | $40/run |
| Tripod polisher | $21/run | $40/run | $40/run |
| Disc cutter | $21/hr | $40/hr | $40/hr |
| Diamond lapping films | $35/film | $35/film | $35/film |
| Non-diamond lapping films | $5/film | $5/film | $5/film |
| Fischione plasma cleaner | $11/hr | $15/hr | $20/hr |
| C-coated Cu TEM grids | $5/grid | $5/grid | $5/grid |
| Chemical reagents | nominal price | nominal price | nominal price |
| Vitrobot | $45/run | $80/run | $100/run |