Rates

Nanofabrication and Electron Microscopy Facility (NEMF) is open to UC Riverside students, faculty, and principal investigators, as well as non-UC Riverside researchers, on a fee for usage basis. Safety training is provided by the staff at no additional cost, but equipment requires training fees.

Cleanroom users are charged a standard lab usage fee, which allows the use of microscopes, fume hoods, dry etching, and wet chemical processing. More complicated equipment, such as metal evaporators, sputters, and e-beam lithography, requires specialized training and additional usage fees. Cleanroom supplies and safety equipment are provided, but users are asked to furnish their own substrates and any unique labware. Deposition sources currently available include aluminum, titanium, nickel, chrome, etc. Gold and platinum require additional charges.

Service / Item UCR Academic/Govt. Commercial
NanoFab Use
General lab use $33.16/hr $46.26/hr $62.84/hr
       
Equipment Hourly Surcharge Fees: (In addition to General Lab use fee)
FIB (Including Engineer) $60/hr $74/hr $108/hr
Raith EBL $80/hr $100/hr $153/hr
E-Beam Evaporator $20/hr $25/hr $29/hr
Sputter Deposition $15/hr $18/hr $22/hr
AFM $45/hr $69/hr $108/hr
       
Microscopy Lab Use
S/TEM Titan Themis 300 $69/hr $100/hr $185/hr
TEM Talos 120 $45/hr $80/hr $100/hr
SEM NNS450 $45/hr $70/hr $100/hr
FIB SEM Quanta3D $40/hr $50/hr $75/hr
SEM Tescan Mira3 $45/hr $70/hr $100/hr
Digital Microscope VHX-7000 $25/hr $36/hr $54/hr
Operator assistance $43/hr $60/hr $60/hr
Basic SEM Training $150/session $200/session $280/session
Basic TEM Training $240/session $350/session $460/session
FIB Training $350/person $550/person $850/person
Support/consultation $27/hr $60/hr $80/hr
Sample preparation $33/hr $60/hr $60/hr
Sputter coating $9/min $12/min $12/min
Vacuum evaporation $22/hr $40/hr $40/hr
Critical-point-drying CPD $22/run $40/run $40/run
Advanced support/consultation $100/hr $100/hr $180/hr
Ultramicrotome $12/hr $20/hr $30/hr
Lapping/polishing $21/run $40/run $40/run
Diamond saw $21/run $40/run $40/run
Fullam carbon coater $21/run $40/run $40/run
Dimpler $21/run $40/run $40/run
Tripod polisher $21/run $40/run $40/run
Disc cutter $21/hr $40/hr $40/hr
Diamond lapping films $35/film $35/film $35/film
Non-diamond lapping films $5/film $5/film $5/film
Fischione plasma cleaner $11/hr $15/hr $20/hr
C-coated Cu TEM grids $5/grid $5/grid $5/grid
Chemical reagents nominal price nominal price nominal price
Vitrobot $45/run $80/run $100/run
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