CFAMM

Central Facility for Advanced Microscopy and Microanalysis

CFAMM tools are available to reserve

Full tool list & reservation system

Lab Capabilities


 

• Fabrication Processes
• Metrology Capabilities

Lab Capabilities

Nanofabrication Facility's Tool Set

 

Nanofabrication tools are available to reserve

• Thin Films/Etch Area
• Photo/Metrology Area
• Lithography

Full tool list and reservation system